Light emitting device, light emitting device package and illumination system for reducing dislocation in semiconductor layer

ABSTRACT

A light emitting device is provided. The light emitting device includes a first semiconductor layer, an uneven part on the first semiconductor layer, a first nonconductive layer including a plurality of clusters on the uneven part, a first substrate layer on the nonconductive layer, and a light emitting structure layer. The light emitting structure layer includes a first conductive type semiconductor layer, an active layer and a second conductive type semiconductor layer on the first substrate layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a Continuation of co-pending U.S. patent applicationSer. No. 12/948,857 filed on Nov. 18, 2010, which claims priority under35 U.S.C. 119 and 35 U.S.C. 365 to Korean Patent Application No.10-2010-0004673 (filed on Jan. 19, 2010), which is hereby incorporatedby reference in its entirety.

BACKGROUND

The present disclosure relates to a light emitting device, lightemitting device package, and an illumination system provided with them.

Group III-V nitride semiconductors have been widely used as the corematerials of light emitting devices such as Light Emitting Diodes (LED)and Laser Diodes (LD), in physical and chemical characteristics. Thegroup III-V nitride semiconductors consist of semiconductor materialshaving the composition equation of In_(x)Al_(y)Ga_(1-x-y)N (where 0≦x≦1,0≦y≦1, and 0≦x+y≦1).

The LED is a sort of semiconductor device that changes electricity intoinfrared rays or light by using the characteristics of compoundsemiconductors to input/output a signal, or is used as a light source.

The LED or the LD with nitride semiconductor materials is much appliedto the light emitting devices for obtaining light. For example, the LEDor the LD is applied as the light sources of all sorts of products suchas the light emitting portions of the key pads of cellular phones,electronic display boards and lighting devices.

SUMMARY

Embodiments provide a light emitting device capable of reducingdislocation in a semiconductor layer.

Embodiments provide a light emitting device having structure layers forreducing dislocation between a substrate and an active layer.

Embodiments provide a light emitting device, and a light emitting devicepackage and an illumination system provided with the same.

In one embodiment, a light emitting device comprises a firstsemiconductor layer; an uneven part on the first semiconductor layer; afirst nonconductive layer including a plurality of clusters on theuneven part; a first substrate layer on the nonconductive layer; and alight emitting structure layer including a first conductive typesemiconductor layer, an active layer and a second conductive typesemiconductor layer on the first substrate layer.

In another embodiment, a light emitting device comprises a firstsemiconductor layer including an uneven part; a discontinuousnonconductive layer on the uneven part of the first semiconductor layer;a substrate layer including an uneven structure on the nonconductivelayer; and a light emitting structure layer including a plurality ofcompound semiconductor layers on the substrate layer, wherein latticeconstant difference between the substrate layer and nitridesemiconductor is equal to or lower than about 5%.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side-sectional view illustrating a light emitting deviceaccording to a first embodiment.

FIGS. 2 to 6 are diagrams illustrating a method for fabricating thelight emitting device according to the first embodiment.

FIG. 7 is a diagram illustrating a light emitting device having alateral electrode structure and using the embodiment illustrated in FIG.1.

FIG. 8 is a diagram illustrating a light emitting device having avertical electrode structure and using the embodiment illustrated inFIG. 1.

FIG. 9 is a diagram illustrating another light emitting device havingthe vertical electrode structure.

FIG. 10 is a side-sectional view illustrating a light emitting deviceaccording to a second embodiment.

FIG. 11 is a side-sectional view illustrating a light emitting devicepackage according to an embodiment.

FIG. 12 is a diagram illustrating a display device according to anembodiment.

FIG. 13 is a diagram illustrating another display device according to anembodiment.

FIG. 14 is a diagram illustrating an illumination device according to anembodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

In the descriptions of embodiments, it will be understood that when alayer (or film), a region, a pattern, or a structure is referred to asbeing ‘on’ substrate, each layer (or film), a region, a pad, orpatterns, it can be directly on substrate each layer (or film), theregion, the pad, or the patterns, or intervening layers may also bepresent. Further, it will be understood that when a layer is referred toas being ‘under’ each layer (film), the region, the pattern, or thestructure, it can be directly under another layer (film), anotherregion, another pad, or another patterns, or one or more interveninglayers may also be present.

A dimension of each of elements may be exaggerated for clarity ofillustration, and the dimension of each of the elements may be differentfrom an actual dimension of each of the elements.

Hereinafter, embodiments will be described with reference to theaccompanying drawings.

FIG. 1 is a diagram illustrating a light emitting device according to afirst embodiment.

Referring to FIG. 1, a light emitting device 100 includes a substrate101, a buffer layer 103, a first semiconductor layer 105, an uneven part107, a nonconductive layer 112, a substrate layer 114, a firstconductive type semiconductor layer 120, an active layer 122, and asecond conductive type semiconductor layer 124.

At least one of sapphire (Al₂O₃), SiC, Si, GaAs, GaN, ZnO, Si, GaP, InP,Ge, and Ga₂O₃ may be used for the substrate 101. An uneven pattern maybe formed on an upper surface of the substrate 101. The uneven patternmay be formed by etching the substrate or by using special material.

The buffer layer 103 is formed on the substrate 101. The buffer layer103 may be formed for reducing a lattice constant difference between thesubstrate 101 and a nitride semiconductor. The buffer layer 103 may beformed in a layer or pattern using, e.g., group II to VI compoundsemiconductor. Preferably, the buffer layer 103 may include group III-Vcompound semiconductor, e.g., at least one selected from a group of GaN,InN, AlN, InGaN, AlGaN, InAlGaN, and AlInN. The buffer layer 103 mayalso be formed with oxide such as a ZnO layer, or it may not be formed;however, it is not limited to this.

The first semiconductor layer 105 may be formed on the substrate 101 orthe buffer layer 103. The first semiconductor layer 105 may be formedfor improving crystallinity of a semiconductor layer.

The first semiconductor layer 105 includes semiconductor material havinga composition equation of In_(x)Al_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1,0≦x+y≦1) using group III-V compound semiconductor.

The first semiconductor layer 105 may be formed in an undopedsemiconductor layer or a first conductive type semiconductor layer. Theundoped semiconductor layer is, e.g., an undoped nitride-basedsemiconductor, where conductive dopant is not doped intentionally. Theundoped semiconductor layer has a noticeably lower conductivity thanthat of the first conductive type semiconductor layer. For instance, theundoped semiconductor layer may be an undoped GaN layer and may havecharacteristics of the first conductive type. The first conductive typesemiconductor layer may include a semiconductor doped with the firstconductive dopant, e.g., at least one of GaN, InN, AlN, InGaN, AlGaN,InAlGaN, and AlInN. Hereinafter, for convenience of explanation, it isassumed that the first semiconductor layer 105 is the undopedsemiconductor layer.

The uneven part 107 is formed on the first semiconductor layer 105. Theuneven part 107 includes the semiconductor material having thecomposition equation of In_(x)Al_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1, 0≦x+y≦1)using group III-V compound semiconductor. The uneven part 107 may beformed with the same material as the first semiconductor layer 105. Theuneven part 107 includes at least one of structures of unevenness,roughness, and texture and may include a regular or irregular size.

At the uneven part 107, concave parts and convex parts are alternatelyarranged. A plurality of the concave parts may be formed in a rod shapeor such a shape whose lower width is larger than its upper width, e.g.,a truncated cone or polygonal shape. At the convex parts of the unevenpart 107, substantially flat upper surfaces are formed at predeterminedintervals. There may be no flat section at the concave part.

The convex parts may be discontinuously arranged on the firstsemiconductor layer 105 being separated from each other.

The uneven part 107 may be formed with the semiconductor doped with thefirst conductive dopant or the undoped nitride-based semiconductor.

The nonconductive layer 112 is formed on the uneven part 107, and thesubstrate layer 114 is formed on the nonconductive layer 112.

The nonconductive layer 112 is a mask layer whose resistance is largerthan that of the uneven part 107 or the undoped semiconductor layer. Thenonconductive layer 112 may be formed in an irregular cluster form and,e.g., may be formed with MgN, SiN, or ZnN.

The nonconductive layer 112 is formed in discontinuous clusters, andeach cluster has a random shape and a random size and may be formed to adiameter of more than several angstroms.

The substrate layer 114 may be embodied as a conductive layer, aninsulating layer, or a nonconductive layer and is formed on thenonconductive layer 112. Herein, a part 114A of the substrate layer 114may be contacted on the uneven part 107 through a gap of thenonconductive layer 112. The substrate layer 114 may be layered as anuneven shape on the nonconductive layer 112.

The substrate layer 114 is substrate material where the nitridesemiconductor may be grown. The substrate layer 114 may be embodied ascarbon-containing material or silicon-based semiconductor whose latticeconstant is almost similar to that of the nitride semiconductor. Thesubstrate layer 114 may be formed with different material from thenitride semiconductor, e.g., silicon carbide (SiC) layer. Herein, GaNhas the lattice constant of a=about 3.189 Å and c=about 5.185 Å. Thelattice constant difference between SiC and the nitride semiconductor islower than at least about 1 or about 5%.

A thickness of the silicon carbide (SiC) layer may range from about 5 Åto about 500 Å. The silicon carbide (SiC) layer may include the firstconductive dopant. The first conductive dopant is N-type dopant and mayinclude Si, Ge, Sn, Se, and Te. Doping concentration of this dopant isnot limited.

The silicon carbide layer may be embodied with carbon-containingmaterial, e.g., silicon carbon nitride (SiCN) layer or carbon nitride(CN) layer. The substrate layer 114 may also be embodied with siliconnitride group, e.g., SiN.

The nonconductive layer 112 and the substrate layer 114 may bealternately layered. A layering period of the nonconductive layer 112and the substrate layer 114 is equal to or lower than 20 periods,wherein a thickness of one period may range from about 1 nm to about 100nm. In the layered structure 110 of the nonconductive layer 112 and thesubstrate layer 114, the substrate layer 114 usable as semiconductorlayer is disposed as an uppermost layer.

The dislocation occurs due to the lattice constant difference betweenthe substrate 101 and the nitride semiconductor layer. The dislocationis transferred through the buffer layer 103 and the first semiconductorlayer 105.

Since the convex parts of the uneven part 107 are separated from eachother, there is an effect of reducing substantial contact area.Accordingly, the number of dislocations which exist at the uneven part107 may be reduced than that of dislocations which exist at the firstsemiconductor layer 105. The uneven part 107 may reduce the dislocationtransferred through the first semiconductor layer 105. Therefore, thefirst conductive type semiconductor layer 120 has a lower dislocationdensity than that of the first semiconductor layer 105.

The nonconductive layer 112 may again reduce the dislocation ascendingthrough the uneven part 107. The nonconductive layer 112 may suppressthe dislocation transferred from the uneven part 107 by using aresistance difference with the uneven part 107.

If the layering period of the nonconductive layer 112 and the substratelayer 114 is 2 or more, the dislocation may be more suppressed.Accordingly, a surface of the semiconductor layer on the substrate layer114 may be formed in a thin film without crack.

The first conductive type semiconductor layer 120 may be formed on thenonconductive layer 112. The first conductive type semiconductor layer120 may include, e.g., the composition equation ofIn_(x)Al_(y)Ga_(1-x-y)N (0≦x≦1, 0≦y≦1, 0≦x+y≦1) of group III-V compoundsemiconductor doped with the first dopant.

The first conductive type semiconductor layer 120 has a thickness ofmore than about 3 μm and may be formed in a single layer or multilayers. The dopant concentration of the first conductive typesemiconductor layer 120 may be higher than that of the undopedsemiconductor layer.

The first conductive type semiconductor layer 120 includes N-typesemiconductor layer, and the first conductive dopant includes N-typedopant such as Si, Ge, Sn, Se, and Te.

The active layer 122 is formed on the first conductive typesemiconductor layer 120. The active layer 122 may be formed in a singlequantum well structure, a multi-quantum well structure, a quantum wirestructure, or a quantum dot structure. The active layer 122 may beformed in a period of a well layer and a barrier layer using group III-Vcompound semiconductor material. For instance, the active layer 122 maybe formed in a period of InGaN well layer/GaN barrier layer, a period ofInGaN well layer/AlGaN barrier layer, and a period of InGaN welllayer/InGaN barrier layer; however, there is no limit for this. A bandgap of the barrier layer may be higher than that of the well layer.

A conductive clad layer may be formed on or/and under the active layer122. The conductive clad layer may be formed with GaN-basedsemiconductor layer. The band gap of the conductive clad layer may behigher than that of the barrier layer.

The second conductive type semiconductor layer 124 is formed on theactive layer 122. The second conductive type semiconductor layer 124 maybe selected from group III-V compound semiconductors doped with secondconductive dopant, e.g., GaN, AlN, AlGaN, InGaN, InN, InAlGaN, AlInN,AlGaAs, GaP, GaAs, GaAsP, and AlGaInP. In the case that the secondconductive type is P-type semiconductor, the second conductive dopantincludes P-type dopant such as Mg and Zn. The second conductive typesemiconductor layer 124 may be foamed in a single layer or multi layers,and it is not limited to this.

According to the embodiment, since the dislocation is suppressed byusing the uneven part 107, the nonconductive layer 112, and thesubstrate layer 114 disposed under the first conductive typesemiconductor layer 120, the first conductive type semiconductor layer120, the active layer 122, and the second conductive type semiconductorlayer 124 may be formed in thin films without crack. The crack-free thinlayer are capable of preventing current concentration so that the devicemay be protected from electrostatic discharge (ESD). The crystallinityof the semiconductor layer is also improved so that internal quantumefficiency and external quantum efficiency may be improved.

A lower part of the first conductive type semiconductor layer 120 may beformed in a rough structure along the uneven surface of the substratelayer 114. The rough structure may improve light extraction efficiency.

The first conductive type semiconductor layer 120 may be formed withP-type semiconductor layer, and the second conductive type semiconductorlayer 124 may be formed with N-type semiconductor layer. On the secondconductive type semiconductor layer 124, the N-type semiconductor layerhaving opposite polarity from the second conductive type may be formed.In the light emitting device 100, the first conductive typesemiconductor layer 120, the active layer 122, and the second conductivetype semiconductor layer 124 may be defined as a light emittingstructure layer. The light emitting structure layer may be embodied asone of structures of N-P junction, P-N junction, N-P-N junction, andP-N-P junction.

At least one of a transparent electrode layer (not illustrated), areflection electrode layer, and an electrode may be formed on the lightemitting structure layer. The transparent electrode layer may be formedwith material including transparent oxide or metal on the secondconductive type semiconductor layer 124. For instance, the transparentelectrode layer may be formed in a single layer or multi layers usingone or more of indium tin oxide (ITO), indium zinc oxide (IZO), indiumzinc tin oxide (IZTO), indium aluminum zinc oxide (IAZO), indium galliumzinc oxide (IGZO), indium gallium tin oxide (IGTO), aluminum zinc oxide(AZO), antimony tin oxide (ATO), gallium zinc oxide (GZO), IrOx, RuOx,RuOx/ITO, Ni, Ag, Ni/IrOx/Au, and Ni/IrOx/Au/ITO.

The reflection electrode layer may be formed with material composed ofAg, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Au, and Hf and their selectivecombination on the light emitting structure layer. The electrode mayinclude at least one from a group of Ti, Al, In, Ta, Pd, Co, Ni, Si, Ge,Ag, and Au. The electrode may include an electrode pad and may furtherinclude a current diffusion pattern.

The light emitting device 100 is capable of suppressing the dislocationgenerated due to lattice mismatch with the substrate by the layeredstructure 110 of the nonconductive layer 112 and the substrate layer114. The light emitting device 100 is also capable of improving thecrystallinity of the semiconductor layers according to growth of nitridesemiconductor layer and the light extraction efficiency.

FIGS. 2 to 6 are diagrams illustrating a method for fabricating thelight emitting device according to the first embodiment.

Referring to FIG. 2, the substrate 101 is loaded on growth equipment,and a plurality of compound semiconductor layers are layered on thesubstrate 101.

The growth equipment may include electron beam evaporator, PhysicalVapor Deposition (PVD), Chemical Vapor Deposition (CVD), Plasma LaserDeposition (PLD), dual-type thermal evaporator sputtering, Metal OrganicChemical Vapor Deposition (MOCVD) and the like, and the growth equipmentis not limited to the listed equipment.

At least one of sapphire (Al₂O₃), SiC, Si, GaAs, GaN, ZnO, Si, GaP, InP,Ge, and Ga₂O₃ may be used for the substrate 101. The uneven pattern maybe formed on the upper surface of the substrate 101. The uneven patternmay be forming by etching the substrate 101 or may be formed in anoptical extraction structure such as roughness structure with specialmaterial.

The buffer layer 103 may be formed on the substrate 101 and may beformed in a layer or pattern using group II to VI compoundsemiconductor. The buffer layer 103 may not be formed, and it is notlimited whether to form the buffer layer 103.

The first semiconductor layer 105 may be formed on the substrate 101 orthe buffer layer 103. The first semiconductor layer 105 may be formedwith the undoped semiconductor using group III-V compound semiconductoror the N-type semiconductor layer. The undoped semiconductor is, e.g.,the nitride-based semiconductor, and is not doped with the conductivedopant intentionally. The N-type semiconductor may be formed with thesemiconductor doped with the first conductive dopant.

In the case that the first semiconductor layer 105 is, e.g., the undopedGaN, it is formed to a predetermined thickness by supplying NH₃ and TMGa(or TEGa) at a first growth temperature (e.g., from about 500° C. toabout 900° C.).

Referring to FIG. 3, the uneven part 107 is formed on the firstsemiconductor layer 105. The uneven part 107 may include thesemiconductor using group III-V compound semiconductor. The uneven part107 may be embodied with the semiconductor layer doped with the firstconductive dopant or the undoped semiconductor layer. The firstsemiconductor layer 105 and the uneven part 107 may be formed with theundoped semiconductor layer.

The convex part of the uneven part 107 may be formed in, e.g., randomrod shape, cone or polygonal shape.

In the case that the uneven part 107 is, e.g., the undoped GaN, it isformed to a predetermined thickness by supplying NH₃ and TMGa (or TEGa)at a second growth temperature (e.g., from about 200° C. to about 600°C.) lower than the first growth temperature. Herein, the second growthtemperature may be lower than the first growth temperature by, e.g.,from about 300° C. to about 500° C. Through this low temperature growth,the convex parts of the uneven part 107 may be separated from eachother. Herein, although the uneven part 107 is formed by condition oflowering temperature in the embodiment, the convex parts whose upperparts are discontinuous may be formed by adjusting conditions such asincreasing growth pressure or increasing flux of Ga.

The lower width of the convex part of the uneven part 107 is larger thanits upper width, and the convex part may be formed in a circle orpolygon shape from a top view. The convex part of the uneven part 107may include the flat section.

Referring to FIG. 4, the plurality of nonconductive parts 112 are formedon the uneven part 107.

The nonconductive parts 112 may be formed in the plurality of clustersshape or discontinuous structures having random shapes and sizes. Thenonconductive layer 112 may be for med with nonconductor including thefirst conductive dopant or the second conductive dopant. For instance,the nonconductive layer 112 may be formed with MgN, SiN, and ZnN. A hole112A is formed between the nonconductive layer 112. Through the hole112A, a part of the uneven part 107 may be exposed.

Referring to FIGS. 4 and 5, the substrate layer 114 may be formed on thenonconductive layer 112.

The substrate layer 114 may be formed with material whose latticeconstant difference from the nitride semiconductor is at most about 1(i.e., below about 5%). Herein, GaN has the lattice constant of a=about3.189 Å and c=about 5.185 Å.

The substrate layer 114 may be formed with, e.g., ceramic-basedsemiconductor or silicon-based semiconductor. For instance, thesubstrate layer 114 may be formed with SiC. For another example, thesubstrate layer 114 may have conductive, nonconductive, or insulatingcharacteristics. Since the substrate layer 114 is provided as a seedlayer of a thin film, it is economically advantageous in comparison withusing expensive SiC substrate.

The part 114A of the substrate layer 114 may be extended through thenonconductive layer 112 and contacted on the uneven part 107.

The nonconductive layer 112 and the substrate layer 114 may be formed atthe growth temperature substantially ranging from about 500° C. to about1000° C. In the case of growing the nonconductive layer 112 with MgN, itmay be grown to a thickness of more than several angstroms by supplyingdopant source including NH₃ and Mg. In the case that the substrate 114is SiC, it may be formed by reaction of silicon and carbon in theevaporator. SiH₃, Si₂H₆, and DTBSi may be used as the silicon material,and CBr₄ or CxHy may be used as the carbon material. A thickness of theSiC layer may range from about 5 Å to about 500 Å. The silicon carbidelayer may be doped with the first conductive dopant. However, suchdoping concentration, thickness, and growth temperature may be varied.The silicon carbide layer may also be embodied with another material,e.g., carbon-containing material such as silicon carbon nitride (SiCN)or carbon nitride (CN).

The nonconductive layer 112 is highly nonconductive in comparison withthe uneven part 107 and may suppress the dislocation ascending from thefirst semiconductor layer 105.

A pair of the nonconductive layer 112 and the substrate layer 114 may begrown to from at least 1 period to 20 periods. Herein, a thickness ofone period may range from about 1 nm to about 100 nm. In the layeredstructure 110 of the nonconductive layer 112 and the substrate layer114, the substrate layer 114 whose combining strength with the nitridesemiconductor layer is relatively better may be disposed as theuppermost layer.

The uneven part 107 may reduce the dislocation ascending from the firstsemiconductor layer 105 under the uneven part 107, and the nonconductivelayer 112 may again reduce the dislocation ascending through the unevenpart 107. That is, the uneven part 107 may reduce an area where thedislocation may ascend by the rod shape, and the nonconductive layer 112may almost completely cut off the dislocation because the nonconductivelayer 112 is formed in the cluster shape on the uneven part 107.

Since the cluster having high resistance is discontinuously formed to arandom shape as the nonconductive layer 112 on the uneven part 107, thedislocation generated due to the lattice constant mismatch between thesubstrate 101 and the nitride semiconductor may be reduced. The randomshape may include a polyhedral shape. Herein, the substrate layer 114formed on the nonconductive layer 112 may be contacted to the layerunder the nonconductive layer 112.

In the case that the pair of the nonconductive layer 112 and thesubstrate layer 114 is formed to several periods, the dislocation may bemore suppressed. The semiconductor layer surface on the substrate layer114 may be formed in the crack-free thin film.

The semiconductor layer may be grown on the substrate layer 114. Forinstance, one of buffer layer, undoped semiconductor layer, and firstconductive type semiconductor layer may be formed in the semiconductorlayer using group III-V semiconductor. Hereinafter, for convenience ofexplanation, it is assumed that the first conductive type semiconductorlayer is formed on the substrate layer 114.

Referring to FIG. 6, the first conductive type semiconductor layer 120may be formed on the substrate 114. The first conductive typesemiconductor layer 120 may include group III-V compound semiconductordoped with the first conductive dopant, e.g., at least one selected froma group of GaN, InN, AlN, InGaN, AlGaN, InAlGaN, and AlInN. In the casethat the first conductive type semiconductor layer 120 is N-typesemiconductor layer, the first conductive dopant includes Si, Ge, Sn,Se, and Te as N-type dopant.

The active layer 122 is formed on the first conductive typesemiconductor layer 120. The active layer may be formed in the singlequantum well structure, multi-quantum well (MQW) structure, quantum dotstructure, or quantum wire structure and may be fanned using group III-Vcompound semiconductor.

The conductive clad layer (not illustrated) may be formed on or/andunder the active layer. The conductive clad layer may be formed withGaN-based semiconductor.

The second conductive type semiconductor layer 124 is foamed on theactive layer 122. The second conductive type semiconductor layer 124 maybe formed with group III-V compound semiconductor doped with the secondconductive dopant, e.g., one of compound semiconductors such as GaN,InN, AlN, InGaN, AlGaN, InAlGaN, and AlInN. In the case that the secondconductive type semiconductor layer 124 is P-type semiconductor layer,the second conductive dopant may include Mg, Zn, Ca, Sr, and Ba asP-type dopant.

The semiconductor layers 120, 122, and 124 may be grown to thecrack-free thin films due to the substrate 114. Such crack-free thinfilm is capable of preventing current concentration so that the activelayer 122 may be protected and the internal quantum efficiency andexternal quantum efficiency may be improved.

The first conductive type semiconductor layer 120 may be formed withP-type semiconductor layer, and the second conductive type semiconductorlayer 124 may be formed with N-type semiconductor layer. N-typesemiconductor layer or P-type semiconductor layer may be formed on thesecond conductive type semiconductor layer 124 as a third conductivetype semiconductor layer. The first conductive type semiconductor layer120, the active layer 122, and the second conductive type semiconductorlayer 124 may be defined as the light emitting structure layer. Thelight emitting structure layer may be embodied as one of the structuresof N-P junction, P-N junction, N-P-N junction, and P-N-P junction.

At least one of a current diffusion layer and a second electrode may beformed on the second conductive type semiconductor layer or the thirdconductive type semiconductor layer. The current diffusion layerincludes the transparent electrode or the reflection electrode layer.The transparent electrode layer may be formed with material selectedfrom metal oxide and metal on the second conductive type semiconductorlayer 124. For instance, the transparent electrode layer may be formedin a single layer or multi layers using one or more of indium tin oxide(ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), indiumaluminum zinc oxide (IAZO), indium gallium zinc oxide (IGZO), indiumgallium tin oxide (IGTO), aluminum zinc oxide (AZO), antimony tin oxide(ATO), gallium zinc oxide (GZO), IrOx, RuOx, RuOx/ITO, Ni, Ag,Ni/IrOx/Au, and Ni/IrOx/Au/ITO.

The reflection layer may be formed with material composed of Ag, Ni, Al,Rh, Pd, Ir, Ru, Mg, Zn, Pt, Au, and Hf and their selective combinationon the second conductive type semiconductor layer 124. The secondelectrode is electrically connected to the second conductive typesemiconductor layer 124 or the transparent electrode layer and may beformed with metal material. The second electrode may include theelectrode pad and may be formed as the current diffusion pattern.

FIG. 7 is a side-sectional view illustrating a light emitting devicehaving a lateral electrode structure and using the embodimentillustrated in FIG. 1.

Referring to FIG. 7, at a light emitting device 100A, the upper surfaceof the first conductive type semiconductor layer 120 is exposed, and afirst electrode 131 is formed on the first conductive type semiconductorlayer 120. The process of exposing the first conductive typesemiconductor layer 120 may be performed through a mesa etching process.

On the second conductive type semiconductor layer 124, the currentdiffusion layer such as the transparent electrode layer or reflectionelectrode layer may be formed in a second electrode layer 126. A secondelectrode 133 may be formed on the second electrode layer 126. Thesecond electrode 126 may be formed with indium tin oxide (ITO), indiumzinc oxide (IZO), indium zinc tin oxide (IZTO), indium aluminum zincoxide (IAZO), indium gallium zinc oxide (IGZO), indium gallium tin oxide(IGTO), aluminum zinc oxide (AZO), antimony tin oxide (ATO), metaloxide, or metal such as Al, Ag, Pd, Rh, Pt, or Ir, or alloy of selectedmetals.

The second electrode 133 may be formed with at least one metal layer,e.g., one or combination from Ag, Ag alloy, Ni, Al, Al alloy, Rh, Pd,Ir, Ru, Mg, Zn, Pt, Au, and Hf. The second electrode 133 may include anelectrode pad, or a separate electrode pad may be formed. The secondelectrode 133 may be directly contacted to the second electrode layeror/and the second conductive type semiconductor layer 124.

Since the light emitting device 100A may improve the dislocation by thenonconductive layer 112 under the active layer 122, there is an effectof increasing light efficiency due to crystallinity of light andimproving ESD.

FIG. 8 is a side-sectional view illustrating a light emitting devicehaving a vertical electrode structure and using the embodimentillustrated in FIG. 1.

Referring to FIG. 8, a plurality of conductive layers 142 and 144 may beformed on the second conductive layer 124 illustrated in FIG. 6. Theconductive layers include a first conductive layer 142 disposed on thesecond conductive type semiconductor layer 124 and a second conductivelayer 144 on the first conductive layer 142. The first conductive layer142 includes an ohmic layer or/and reflection layer. The firstconductive layer 142 is formed with metal or alloy including at leastone among reflection members such as Al, Ag, Pd, Rh, Pt, and Ir. Thesecond conductive layer 144 is a conductive support member and may beformed to a thickness of more than tens of micro meters. The secondconductive layer 144 may selectively include copper (Cu), gold (Au),nickel (Ni), molybdenum (Mo), copper-tungsten (Cu—W), and carrier wafer(e.g., Si, Ge, GaAs, ZnO, SiC, SiGe, Ga₂O₃). The first conductive layer142 and the second conductive layer 144 supply power of a secondpolarity. At least one layer or pattern may be formed between the firstconductive layer 142 and the second conductive type semiconductor layer120. Material for the at least one layer or pattern is oxide materialsuch as ITO, and it may be formed in an ohmic contact layer or/andcurrent blocking layer.

The substrate 101 of FIG. 6 under the buffer layer 103 may be eliminatedin a physical or/and chemical method. Laser Lift Off (LLO) method may beused as the method of eliminating the substrate. According to the LLOmethod, the second conductive layer 144 is disposed on a base, and then,laser of a predetermined wavelength is irradiated to the substrate 101for eliminating it.

The buffer layer 103 and the first semiconductor layer 105 areeliminated through a wet etching. The buffer layer 103 and the firstsemiconductor layer 105 may be eliminated by selectively using dryetching and polishing.

The nonconductive layer 112 of FIG. 5 under the first conductive typesemiconductor layer 120 except for the substrate layer 114 may also beeliminated. Herein, in the case that the substrate layer 114 is SiC, itmay not be eliminated. The first electrode 131 is formed under thesubstrate layer 114. Accordingly, a light emitting device 100B havingthe vertical electrode structure is embodied.

Since the substrate layer 114 is formed in the uneven structure by thenonconductor of cluster form in the light emitting device 100B, thelight extraction efficiency may be improved.

FIG. 9 is a diagram illustrating another light emitting device havingthe vertical electrode structure. For explaining the embodiment, thesame parts in comparison with FIG. 8 are described referring to FIG. 8,and overlapped explanations are omitted.

Referring to FIG. 9, in a light emitting device 100C, the firstelectrode 131 is disposed to the first conductive type semiconductorlayer 120. By further removing the substrate layer of FIG. 8, the firstconductive type semiconductor layer 120 is exposed to form the firstelectrode 131. Herein, a lower surface of the first conductive typesemiconductor layer 120 may be formed in the roughness structure. Suchroughness structure is formed through removing the substrate layer andit is unnecessary to perform a special etching process to the conductivetype semiconductor layer 120.

FIG. 10 is a side-sectional view illustrating a light emitting deviceaccording to a second embodiment. For explaining the second embodiment,the same parts in comparison with the first embodiment are referred toas the same numeric and overlapped explanations are omitted.

Referring to FIG. 10, a light emitting device 100D includes a substrate101, a buffer layer 103, a first semiconductor layer 105, an uneven part107, a first nonconductive layer 112, a first substrate layer 114, asecond semiconductor layer 115, a second nonconductive layer 116, asecond substrate layer 117, a first conductive type semiconductor layer120, an active layer 122, and a second conductive type semiconductorlayer 124.

The first nonconductive layer 112 and the first substrate 114 are formedin at least one period on the uneven part 107. The first nonconductivelayer 112 and the first substrate 114 refer to the nonconductive layerand the substrate layer of FIG. 1.

The second semiconductor layer 115 may be formed with group III-Vcompound semiconductor doped with the first conductive dopant, e.g.,GaN, InN, AlN, InGaN, AlGaN, InAlGaN, and AlInN, on the first substratelayer 114. An upper surface of the second semiconductor layer 115 may beeven or uneven.

The second nonconductive layer 116 may be formed with a cluster havingnonconductive characteristics. For instance, the second nonconductivelayer 116 is formed with nonconductor and MgN, SiN, and ZnN and may bediscontinuously formed on the second semiconductor layer 115. The secondnonconductive layer 116 may be formed in nonconductor using, e.g., thefirst conductive dopant or/and second conductive dopant.

The second semiconductor layer 115 may be disposed between the secondsubstrate layer 117 and the first substrate layer 114. The secondsubstrate 117 is formed on the second nonconductive layer 116 and itsportion may be contacted on the second semiconductor layer 115. Thesecond substrate layer 117 may be selected among substrate materialssuch as conductive layer, nonconductive layer, and insulating layer. Thesecond substrate layer 117 may be formed with SiC and SiN.

The second nonconductive layer 116 and the second substrate layer 117may be formed in at least one period. In the case that the secondsemiconductor layer 115 is the first conductive semiconductor, thesecond nonconductive layer 116 and the second substrate layer 117 may bedisposed in the first conductive type semiconductor layers 115 and 120.The light emitting device 100D suppresses the dislocation transferredfrom below of the active layer 122 so that crack-free surface of layermay be provided.

The light emitting device according to the embodiments may be packagedon a semiconductor substrate of resin material or silicon, an insulatingsubstrate, and a ceramic substrate, and it may be used as a system lightsource of indicating devices, illumination devices, display devices, andthe like.

FIG. 11 is a diagram illustrating a light emitting device packageaccording to an embodiment.

Referring to FIG. 11, a light emitting device package 30 includes a body20, a first lead electrode 31 and a second lead electrode 32 disposed atthe body 20, a light emitting device 100A according to the embodiment,and a molding member 40 covering the light emitting device 100A. Herein,the light emitting device is disposed at the body 20 and electricallyconnected to the first lead electrode 31 and the second lead electrode32.

The body 20 may be formed including the conductive substrate such assilicon, synthetic resins such as PPA, ceramic substrate, insulatingsubstrate, or metal substrate (e.g., MCPCB). The body 20 includes aconcave part such as a cavity whose upper part is open. At the concavepart, the light emitting device 100A is disposed, and the first andsecond lead electrodes 31 and 32 are exposed. A sloping surface may beformed on the circumference of the concave part. The body 20 may includea through-hole structure, and it is not limited to this.

The first lead electrode 31 and the second lead electrode 32 areelectrically separated from each other and supply power to the lightemitting device 100A. The first lead electrode 31 and the second leadelectrode 32 may also increase light efficiency by reflecting lightgenerated from the light emitting device 100A and may serve to emit heatgenerated from the light emitting device 100A.

The light emitting device 100A may be installed on the body 20, or onthe first lead electrode 31 or the second lead electrode 32.

The light emitting device 100A may be connected to the first leadelectrode 31 and the second lead electrode 32 through a wire.

The molding member 40 may surround the light emitting device 100A toprotect the light emitting device 100A. Also, a fluorescent substancemay be included in the molding member 40 so that wavelength of lightemitted from the light emitting device 100A may be varied. A lens may bedisposed on the molding member 40, and the lens may be embodied as aform to be contacted or not to be contacted to the molding member 40.

The light emitting device 100A may be electrically connected to a lowersurface of the body or substrate through the through-hole.

On the light emitting device package 30, at least one of the lightemitting devices of the above-described embodiments may be installed,and there is no limit for this.

Although the light emitting device package has been described as a topview form, it may also be embodied as a side view method so that theabove-described heat radiating characteristics, conductivity andreflection characteristics may be improved. The light emitting deviceaccording to the top view or side view method may be packaged by theresin layer as above-described, and then, the lens may be formed orattached on the resin layer; there is no limit for this.

[Illumination System]

The light emitting device or light emitting device package according tothe embodiments may be applied to an illumination system. Theillumination system may include a structure of an array of a pluralityof light emitting devices or light emitting device packages.

The illumination system may include display devices illustrated in FIGS.12 and 13, an illumination device illustrated in FIG. 14, illuminationlamps, signal lights, car headlights, electronic displays, and the like.

FIG. 12 is an exploded perspective view illustrating a display deviceaccording to an embodiment.

Referring to FIG. 12, a display device 1000 according to the embodimentmay include a light guide plate 1041, a light emitting module 1031providing light to the light guide plate 1041, a reflection member 1022under the light guide plate 1041, an optical sheet 1051 on the lightguide plate 1041, a display panel 1061 on the optical sheet 1051, and abottom cover 1011 storing the light guide 1041, the light emittingmodule 1031, and the reflection member 1022; however, it is not limitedto this.

The bottom cover 1011, the reflection sheet 1022, the light guide plate1041, and the optical sheet 1051 may be defined as a light unit 1050.

The light guide plate 1041 serves to diffuse light for convergence to asurface light source. The light guide plate 1041 is formed withtransparent material and, e.g., may include one of acrylic resin such aspolymethyl metaacrylate (PMMA), polyethylene terephthlate (PET), polycarbonate (PC), cycloolefin copolymer (COC), and polyethylenenaphthalate (PEN) resins.

The light emitting module 1031 provides light to at least one side ofthe light guide plate 1041 and ultimately acts as a light source of thedisplay device.

At least one light emitting module 1031 is included, and it may providelight directly or indirectly at one side of the light guide plate 1041.The light emitting module 1031 includes a substrate 1033 and the lightemitting device package 30 according to the above-disclosed embodiment.The light emitting device package 30 may be arrayed at predeterminedintervals on the substrate 1033.

The substrate 1033 may be a Printed Circuit Board (PCB) including acircuit pattern (not illustrated). However, the substrate 1033 mayinclude not only the typical PCB but also a metal core PCB (MCPCB) and aflexible PCB (FPCB), and it is not limited to this. In the case that thelight emitting device package 30 is installed on the side of the bottomcover 1011 or on a heat radiating plate, the substrate 1033 may beeliminated. Herein, a part of the heat radiating plate may be contactedto an upper surface of the bottom cover 1011.

The plurality of light emitting device packages 30 may be installed onthe substrate 1033 so that a light-emitting surface is separated fromthe light guide plate 1041 by a predetermined distance, and there is nolimit for this. The light emitting device package 30 may provide lightto a light-entering part, i.e., one side, of the light guide plate 1041directly or indirectly, and there is no limit for this.

The reflection member 1022 may be disposed under the light guide plate1041. The reflection member 1022 reflects the light incident to thelower surface of the light guide plate 1041 in an upward direction sothat brightness of the light unit 1050 may be improved. The reflectionmember 1022 may be formed with, e.g., PET, PC, PVC resins; however, itis not limited to this. The reflection member 1022 may be the uppersurface of the bottom cover 1011; however, there is no limit for this.

The bottom cover 1011 may store the light guide plate 1041, the lightemitting module 1031, and the reflection member 1022. To this end, thebottom cover 1011 may be provided with a storing unit 1012 having ashape of a box whose upper surface is open, and there is not limit forthis. The bottom cover 1011 may be combined with a top cover, and thereis no limit for this.

The bottom cover 1011 may be formed with metal material or resinmaterial and may be fabricated using processes of press or extrusionmolding. The bottom cover 1011 may also include metal or non-metalmaterial having good thermal conductivity, and there is no limit forthis.

The display panel 1061 is, e.g., an LCD panel, and includes transparentfirst and second substrates, and a liquid crystal layer between thefirst and second substrates. On at least one side of the display panel1061, a polarizing plate may be attached; however, the attachingstructure is not limited to this. The display panel 1061 displaysinformation by the light which passes through the optical sheet 1051.The display device 1000 may be applied to various cell phones, monitorsof notebook computers, monitors of laptop computers, and televisions.

The optical sheet 1051 is disposed between the display panel 1061 andthe light guide plate 1041 and includes at least one translucent sheet.The optical sheet 1051 may include at least one of, e.g., diffusionsheet, horizontal and vertical prism sheets, and brightness enhancementsheet. The diffusion sheet diffuses the incident light. The horizontalor/and vertical prism sheet concentrates the incident light to a displayregion. The brightness enhancement sheet reuses lost light to enhancebrightness. A protection sheet may be disposed on the display panel1061, and there is no limit for this.

Herein, on the light path of the light emitting module 1031, the lightguide plate 1041 and the optical sheet 1051 may be included as opticalmembers; however, there is no limit for this.

FIG. 13 is a diagram illustrating a display device according to anembodiment.

Referring to FIG. 13, a display device 1100 includes a bottom cover1152, a substrate 1120, an optical member 1154, and a display panel1155. Herein, the above-disclosed light emitting device packages 30 arearrayed on the substrate 1120.

The substrate 1120 and the light emitting device package 30 may bedefined as a light emitting module 1060. The bottom cover 1152, at leastone light emitting module 1060, and the optical member 1154 may bedefined as a light unit.

The bottom cover 1152 may be provided with a storing unit 1153, andthere is no limit for this.

Herein, the optical member 1154 may includes at least one of the lens,light guide plate, diffusion sheet, horizontal and vertical prismsheets, and brightness enhancement sheet. The light guide plate may beformed with PC material or polymethyl metaacrylate (PMMA) material, andthis light guide plate may be eliminated. The diffusion sheet diffusesthe incident light. The horizontal or/and vertical prism sheetconcentrates the incident light to the display region. The brightnessenhancement sheet reuses lost light to enhance brightness.

The optical member 1154 is disposed on the light emitting module 1060.The optical member 1154 converts the light emitted from the lightemitting module 1060 to the surface light source, or performs diffusingand concentrating light.

FIG. 14 is a perspective view illustrating an illumination deviceaccording to an embodiment.

Referring to FIG. 14, an illumination device 1500 may include a case1510, a light emitting module 1530 installed to the case 1510, and aconnection terminal 1520 installed to the case 1510 and provided withpower from an external power source.

It is preferable to form the case 1510 with material which has good heatradiation characteristics. For instance, the case 1510 may be formedwith metal material or resin material.

The light emitting module 1530 may include a substrate 1532 and thelight emitting device package 30 according to the embodiment installedon the substrate 1532. The plurality of light emitting device packages30 may be arrayed in a matrix form or may be arrayed being separatedfrom each other at predetermined intervals.

The substrate 1532 may be an insulator where a circuit pattern isprinted. For instance, the substrate 1532 may include the PCB, metalcore PCB, flexible PCB, ceramic PCB, and FR-4 substrate.

The substrate 1532 may also be formed with material which efficientlyreflects light, or its surface may be coated with color, e.g., white andsilver, which efficiently reflects light.

At least one light emitting device package 30 may be installed on thesubstrate 1532. Each of the light emitting device packages 30 mayinclude at least one Light Emitting Diode (LED) chip. The LED chip mayinclude a light emitting diode of visible light such as red, green,blue, or white or a UV light emitting diode which emits Ultra Violet(UV).

A combination of various light emitting device packages 30 may bedisposed in the light emitting module 1530 for obtaining color tone andbrightness. For instance, for securing high Color Rendering Index (CRI),a white light emitting diode, a red light emitting diode, and a greenlight emitting diode may be combined and disposed.

The connection terminal 1520 may be electrically connected to the lightemitting module 1530 to supply power. The connection terminal 1520 isscrewed to be connected to the external power source in a socket method;however, there is no limit for this. For instance, the connectionterminal 1520 may be formed in a pin shape to be inserted into theexternal power source or may be connected to the external power sourceby a wire.

Features of the above-disclosed embodiments are not limited to theembodiments but may be selectively applied to other embodiments. Othermodifications and applications are possible through selectivecombination within the technical scope of the embodiments.

A method for fabricating the light emitting device according to theembodiment includes forming a first semiconductor layer on a substrateusing compound semiconductor; forming an uneven part including nitridesemiconductor on the first semiconductor layer; forming a discontinuousnonconductive layer on the uneven part; forming a substrate layer on thenonconductive layer; and forming a plurality of compound semiconductorlayers on the substrate layer.

According to the embodiments, the dislocation from below of the activelayer can be improved, and the crystallinity of the semiconductor layercan be improved, and the light emitting efficiency can be improved. Thereliability of the light emitting device and the light emitting devicepackage can also be improved.

Although embodiments have been described with reference to a number ofillustrative embodiments thereof, it should be understood that numerousother modifications and embodiments can be devised by those skilled inthe art that will fall within the spirit and scope of the principles ofthis disclosure. More particularly, various variations and modificationsare possible in the component parts and/or arrangements of the subjectcombination arrangement within the scope of the disclosure, the drawingsand the appended claims. In addition to variations and modifications inthe component parts and/or arrangements, alternative uses will also beapparent to those skilled in the art.

What is claimed is:
 1. A light emitting device, comprising: a firstsemiconductor layer; a plurality of convex structures disposed on a topsurface of the first semiconductor layer; a first uneven layer on a topsurface of the plurality of convex structures; a nonconductive layerbetween the top surface of the plurality of convex structures and thefirst uneven layer; and a light emitting structure layer disposed on atop surface of the first uneven layer, the light emitting structurelayer including a first conductive semiconductor layer, an active layeron the first conductive semiconductor layer and a second conductivesemiconductor layer on the active layer, wherein the nonconductive layerincludes a contact portion contacted directly with the top surface ofthe plurality of convex structures, wherein the nonconductive layer isformed of a different material from the plurality of convex structuresand the first uneven layer, wherein the first uneven layer is formed ofa different material from the plurality of convex structures, whereinthe plurality of convex structures are disposed in a discontinuousstructure on the top surface of the first semiconductor layer, andwherein the nonconductive layer includes at least one selected from agroup of MgN, SiN, and ZnN.
 2. The light emitting device according toclaim 1, wherein the plurality of convex structures are formed of aIII-V compound semiconductor.
 3. The light emitting device according toclaim 1, wherein the nonconductive layer is disposed between theplurality of convex structures.
 4. The light emitting device accordingto claim 1, wherein the nonconductive layer is formed of a plurality ofclusters spaced apart from each other.
 5. The light emitting deviceaccording to claim 1, wherein the nonconductive layer includes a metalnitride.
 6. The light emitting device according to claim 1, wherein thefirst uneven layer is formed of a conductive layer.
 7. The lightemitting device according to claim 1, wherein the first uneven layer isformed of an insulating layer.
 8. The light emitting device according toclaim 1, wherein the first uneven layer includes material whose latticeconstant difference with nitride-based semiconductor is equal to orlower than about 5%.
 9. The light emitting device according to claim 1,wherein the first uneven layer includes an n-type dopant.
 10. A lightemitting device, comprising: a first semiconductor layer; a plurality ofconvex structures disposed on a top surface of the first semiconductorlayer; a first uneven layer on a top surface of the plurality of convexstructures; a nonconductive layer between the top surface of theplurality of convex structures and the first uneven layer; and a lightemitting structure layer disposed on a top surface of the first unevenlayer, the light emitting structure layer including a first conductivesemiconductor layer, an active layer on the first conductivesemiconductor layer and a second conductive semiconductor layer on theactive layer, wherein the nonconductive layer includes a contact portioncontacted directly with the top surface of the plurality of convexstructures, wherein the nonconductive layer is formed of a differentmaterial from the plurality of convex structures and the first unevenlayer, wherein the first uneven layer is formed of a different materialfrom the plurality of convex structures, wherein the first uneven layerincludes a carbon-containing material or a silicon-containing material,and wherein the nonconductive layer includes at least one selected froma group of MgN, SiN, and ZnN and the first uneven layer includes atleast one of SiC, SiN, SiCN, and CN.
 11. A light emitting device,comprising: a first semiconductor layer; a plurality of convexstructures disposed on a top surface of the first semiconductor layer; afirst uneven layer on a top surface of the plurality of convexstructures; a nonconductive layer between the top surface of theplurality of convex structures and the first uneven layer; and a lightemitting structure layer disposed on a top surface of the first unevenlayer, the light emitting structure layer including a first conductivesemiconductor layer, an active layer on the first conductivesemiconductor layer and a second conductive semiconductor layer on theactive layer, wherein the nonconductive layer includes a contact portioncontacted directly with the top surface of the plurality of convexstructures, wherein the nonconductive layer is formed of a differentmaterial from the plurality of convex structures and the first unevenlayer, wherein the first uneven layer is formed of a different materialfrom the plurality of convex structures, wherein the plurality of convexstructures are disposed in a discontinuous structure on the top surfaceof the first semiconductor layer, and wherein the first conductivesemiconductor layer has a dislocation density lower than that of thefirst semiconductor layer.
 12. A light emitting device, comprising: afirst semiconductor layer; a plurality of convex structures disposed ona top surface of the first semiconductor layer; a first uneven layer ona top surface of the plurality of convex structures; a nonconductivelayer between the top surface of the plurality of convex structures andthe first uneven layer; a light emitting structure layer disposed on atop surface of the first uneven layer, the light emitting structurelayer including a first conductive semiconductor layer, an active layeron the first conductive semiconductor layer and a second conductivesemiconductor layer on the active layer; and a substrate under a lowersurface of the first semiconductor layer and a second semiconductorlayer between the first semiconductor layer and the substrate, whereinthe nonconductive layer includes a contact portion contacted directlywith the top surface of the plurality of convex structures, wherein thenonconductive layer is formed of a different material from the pluralityof convex structures and the first uneven layer, wherein the firstuneven layer is formed of a different material from the plurality ofconvex structures, and wherein the plurality of convex structures aredisposed in a discontinuous structure on the top surface of the firstsemiconductor layer.
 13. A light emitting device, comprising: a firstsemiconductor layer, a plurality of convex structures on the firstsemiconductor layer; a first uneven layer on a top surface of theplurality of convex structures; a nonconductive layer between the topsurface of the plurality of convex structures and the first unevenlayer; and a light emitting structure layer disposed on a top surface ofthe first uneven layer, the light emitting structure layer including afirst conductive semiconductor layer including an n-type dopant, anactive layer on the first conductive semiconductor layer and a secondconductive semiconductor layer including a p-type dopant on the activelayer, wherein the plurality of convex structures is disposed betweenthe first semiconductor layer and the first uneven layer, wherein thenonconductive layer is formed of a different material from the pluralityof convex structures and the first uneven layer, wherein a portion ofthe nonconductive layer and a portion of the first uneven layer aredisposed between the plurality of convex structures, wherein a portionof the first uneven layer contacts the plurality of convex structuresand a side surface of the non-conductive layer, and wherein thenonconductive layer includes at least one selected from a group of MgN,SiN, and ZnN.
 14. The light emitting device according to claim 13,wherein the plurality of convex structures are formed of a group III-Vcompound semiconductor and are disposed in a discontinuous structure ona flat top surface of the first semiconductor layer.
 15. The lightemitting device according to claim 13, wherein the nonconductive layeris formed of a cluster having a metal nitride.
 16. The light emittingdevice according to claim 13, wherein the first uneven layer includes atleast one of SiC, SiN, SiCN, and CN.
 17. The light emitting deviceaccording to claim 13, wherein the nonconductive layer has a recess onthe plurality of convex structures and the portion of the first unevenlayer is disposed in the recess of the nonconductive layer.